Details
- Application number :
- 48757
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method and apparatus for electron beam irradiation
- Inventor :
- Nakamura, Atsushi
;
Kiga, Masahiro
- Agent name :
-
- Address for service :
-
- Filing date :
- 12 April 2001
- Associated companies :
-
- Applicant name :
- Ebara Corporation
- Applicant address :
-
- Old name :
-
- Original Source :
- Go