High speed magnetic modulator voltage and temperature timing compensation circuit
A Standard patent application filed on 06 December 2000 credited to Ness, Richard M. ; Johns, David M. ; Sandstrom, Richard L ; Partlo, William N

Details

Application number :

27255  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

High speed magnetic modulator voltage and temperature timing compensation circuit  

Inventor :

Ness, Richard M. ; Johns, David M. ; Sandstrom, Richard L ; Partlo, William N  

Agent name :

 

Address for service :

 

Filing date :

06 December 2000  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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