Minute electromechanical actuation and fluid control devices and integrated systems based on low temperature co-fired ceramic (ltcc) tape technology
A Standard patent application filed on 03 November 2000 credited to Bau, Haim H.
;
Santiago-Aviles, Jorge J.
;
Lynch, Heather
;
Ananthasuresh, Suresh G. K.
;
Gongora-Rubio, Mario
;
Kim, Moon
Details
Application number :
25739
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Minute electromechanical actuation and fluid control devices and integrated systems based on low temperature co-fired ceramic (ltcc) tape technology
Inventor :
Bau, Haim H.
;
Santiago-Aviles, Jorge J.
;
Lynch, Heather
;
Ananthasuresh, Suresh G. K.
;
Gongora-Rubio, Mario
;
Kim, Moon