Methods and apparatus for forming submicron patterns on films
A Standard patent application filed on 22 December 2000 credited to Steiner, Ullrich
;
Thurn-Albrecht, Thomas
;
Mylnek, Jurgen
;
Russel, Thomas P.
;
Schaffer, Erik
Details
Application number :
24540
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
Methods and apparatus for forming submicron patterns on films
Inventor :
Steiner, Ullrich
;
Thurn-Albrecht, Thomas
;
Mylnek, Jurgen
;
Russel, Thomas P.
;
Schaffer, Erik
Agent name :
Davies Collison Cave
Address for service :
Level 15 1 Nicholson Street MELBOURNE VIC 3000
Filing date :
22 December 2000
Associated companies :
Applicant name :
University of Massachusetts
Applicant address :
26th Floor One Beacon Street Boston MA 02110-2804 United States Of America