Method of chemical vapor deposition of metal films
A Standard patent application filed on 07 October 1998 credited to Arena, Chantal ; Hillman, Joseph T ; Guidotti, Emmanuel ; Bertram, Ronald T.

Details

Application number :

97894  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of chemical vapor deposition of metal films  

Inventor :

Arena, Chantal ; Hillman, Joseph T ; Guidotti, Emmanuel ; Bertram, Ronald T.  

Agent name :

 

Address for service :

 

Filing date :

07 October 1998  

Associated companies :

 

Applicant name :

Tokyo Electron Arizona, Inc.  

Applicant address :

 

Old name :

 

Original Source :

Go