A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
A Standard patent application filed on 24 September 1998 credited to Huibers, Andrew Gerrit
Details
Application number :
95837
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements