Liquid reagent delivery system
A Standard patent application filed on 25 September 1998 credited to Sturm, Edward A. ; Brestovansky, Dennis F. ; Van Buskirk, Peter C. ; Kirlin, Peter S.

Details

Application number :

95072  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Liquid reagent delivery system  

Inventor :

Sturm, Edward A. ; Brestovansky, Dennis F. ; Van Buskirk, Peter C. ; Kirlin, Peter S.  

Agent name :

 

Address for service :

 

Filing date :

25 September 1998  

Associated companies :

 

Applicant name :

Advanced Technology Materials, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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