Cathode current control system for a wafer electroplating apparatus
A Standard patent application filed on 17 September 1998 credited to Hanson, Kyle M. ; Doolittle, James W. ; Coyle, Kevin W. ; Haugen, K. Chris

Details

Application number :

94894  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Cathode current control system for a wafer electroplating apparatus  

Inventor :

Hanson, Kyle M. ; Doolittle, James W. ; Coyle, Kevin W. ; Haugen, K. Chris  

Agent name :

 

Address for service :

 

Filing date :

17 September 1998  

Associated companies :

 

Applicant name :

Semitool, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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