Thermal arched beam microelectromechanical devices and associated fabrication methods
A Standard patent application filed on 28 August 1998 credited to Dhuler, Vijayakumar R ; Mahadevan, Ramaswamy ; Wood, Robert L.

Details

Application number :

92127  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Thermal arched beam microelectromechanical devices and associated fabrication methods  

Inventor :

Dhuler, Vijayakumar R ; Mahadevan, Ramaswamy ; Wood, Robert L.  

Agent name :

 

Address for service :

 

Filing date :

28 August 1998  

Associated companies :

 

Applicant name :

MCNC  

Applicant address :

 

Old name :

 

Original Source :

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