Method and apparatus for providing thin films
A Standard patent application filed on 05 August 1998 credited to Deming, Stephen R.
;
Bibl, Andreas
;
Stewart, John F.
Details
Application number :
86940
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for providing thin films
Inventor :
Deming, Stephen R.
;
Bibl, Andreas
;
Stewart, John F.