Projection exposure method, projection aligner, and methods of manufacturing andoptically cleaning the aligner
A Standard patent application filed on 22 July 1998 credited to Matsumoto, Yukako ; Ogata, Taro ; Mori, Susumu

Details

Application number :

83562  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Projection exposure method, projection aligner, and methods of manufacturing andoptically cleaning the aligner  

Inventor :

Matsumoto, Yukako ; Ogata, Taro ; Mori, Susumu  

Agent name :

 

Address for service :

 

Filing date :

22 July 1998  

Associated companies :

 

Applicant name :

Nikon Corporation  

Applicant address :

 

Old name :

 

Original Source :

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