Shield for sputter coating method and apparatus
A Standard patent application filed on 04 June 1998 credited to Tudhope, Andrew W. ; Mercado, Raul D. ; Jordan, David B.

Details

Application number :

78209  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Shield for sputter coating method and apparatus  

Inventor :

Tudhope, Andrew W. ; Mercado, Raul D. ; Jordan, David B.  

Agent name :

 

Address for service :

 

Filing date :

04 June 1998  

Associated companies :

 

Applicant name :

Semiconductor Equipment Technology, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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