Miniature micromachined quadrupole mass spectrometer array and method of making the same
A Standard patent application filed on 02 June 1998 credited to Brennen, Reid A.
;
Wiberg, Dean
;
Orient, Otto
;
Hecht, Michael
;
Chutjian, Ara
Details
Application number :
78054
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Miniature micromachined quadrupole mass spectrometer array and method of making the same
Inventor :
Brennen, Reid A.
;
Wiberg, Dean
;
Orient, Otto
;
Hecht, Michael
;
Chutjian, Ara