Substrate heating apparatus with glass-ceramic panels and thin film ribbon heater element
A Standard patent application filed on 19 May 1998 credited to Holden, Scott C. ; Asdigha, Mehran ; Valenza, Mario ; Dilmaghani, Darius ; Moschini, Lawrence R.

Details

Application number :

74986  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Substrate heating apparatus with glass-ceramic panels and thin film ribbon heater element  

Inventor :

Holden, Scott C. ; Asdigha, Mehran ; Valenza, Mario ; Dilmaghani, Darius ; Moschini, Lawrence R.  

Agent name :

 

Address for service :

 

Filing date :

19 May 1998  

Associated companies :

 

Applicant name :

Brooks Automation, Inc.  

Applicant address :

 

Old name :

 

Original Source :

Go