Method and apparatus for clamping a substrate
A Standard patent application filed on 11 May 1998 credited to Graven, Andrew J. ; Ra, Yunju ; McCuen, Kenneth A. ; Schmidt, Melvin

Details

Application number :

73789  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for clamping a substrate  

Inventor :

Graven, Andrew J. ; Ra, Yunju ; McCuen, Kenneth A. ; Schmidt, Melvin  

Agent name :

 

Address for service :

 

Filing date :

11 May 1998  

Associated companies :

 

Applicant name :

Watkins-Johnson Company  

Applicant address :

 

Old name :

 

Original Source :

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