Apparatus and method of separating sample and substrate fabrication method
A Standard patent application filed on 15 June 1998 credited to Omi, Kazuaki ; Yanagita, Kazutaka ; Sakaguchi, Kiyofumi ; Yonehara, Takao

Details

Application number :

71869  

Application type :

Standard  

Application status :

CEASED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus and method of separating sample and substrate fabrication method  

Inventor :

Omi, Kazuaki ; Yanagita, Kazutaka ; Sakaguchi, Kiyofumi ; Yonehara, Takao  

Agent name :

SPRUSON & FERGUSON  

Address for service :

GPO Box 3898 SYDNEY NSW 2001  

Filing date :

15 June 1998  

Associated companies :

 

Applicant name :

Canon Kabushiki Kaisha  

Applicant address :

30-2 Shimomaruko 3-chome Ohta-ku Tokyo Japan  

Old name :

 

Original Source :

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