Thermally isolated silicon layer
A Standard patent application filed on 15 April 1998 credited to Harpin, Arnold Peter Roscoe
;
Tidmarsh, Jolyon Richard
;
Rickman, Andrew George
Details
Application number :
70617
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Thermally isolated silicon layer
Inventor :
Harpin, Arnold Peter Roscoe
;
Tidmarsh, Jolyon Richard
;
Rickman, Andrew George