Magnesium oxide sputtering apparatus
A Standard patent application filed on 17 March 1998 credited to Chapin, John S.
;
O'Keefe, Patrick L.
;
Elliott, Stephen M.
Details
Application number :
67615
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Magnesium oxide sputtering apparatus
Inventor :
Chapin, John S.
;
O'Keefe, Patrick L.
;
Elliott, Stephen M.