Method and apparatus for temperature controlled spin-coating systems
A Standard patent application filed on 26 February 1998 credited to Ebert, Andreas

Details

Application number :

65447  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for temperature controlled spin-coating systems  

Inventor :

Ebert, Andreas  

Agent name :

 

Address for service :

 

Filing date :

26 February 1998  

Associated companies :

 

Applicant name :

Fairchild Corporation, The  

Applicant address :

 

Old name :

 

Original Source :

Go  

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