Method and system relating to thickness control of film vapor deposition
A Standard patent application filed on 01 December 2000 credited to Montcalm, Claude ; Walton, Christopher Charles ; Folta, James Allen

Details

Application number :

19401  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and system relating to thickness control of film vapor deposition  

Inventor :

Montcalm, Claude ; Walton, Christopher Charles ; Folta, James Allen  

Agent name :

 

Address for service :

 

Filing date :

01 December 2000  

Associated companies :

 

Applicant name :

Regents of the University of California, The  

Applicant address :

 

Old name :

 

Original Source :

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