Details
- Application number :
- 60161
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method for passivation of a metallization layer
- Inventor :
- Graham, Sandra W.
- Agent name :
-
- Address for service :
-
- Filing date :
- 05 January 1998
- Associated companies :
-
- Applicant name :
- Semitool, Inc.
- Applicant address :
-
- Old name :
-
- Original Source :
- Go