Semiconductor substrate and process for producing same
A Standard patent application filed on 26 March 1998 credited to Ohmi, Kazuaki
;
Sakaguchi, Kiyofumi
;
Yonehara, Takao
Details
Application number :
59666
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
Semiconductor substrate and process for producing same