Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same
A Standard patent application filed on 15 January 1998 credited to Miller, Cynthia A. ; Tom, Glenn M

Details

Application number :

59600  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same  

Inventor :

Miller, Cynthia A. ; Tom, Glenn M  

Agent name :

 

Address for service :

 

Filing date :

15 January 1998  

Associated companies :

 

Applicant name :

Advanced Technology Materials, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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