Inspection equipment using small-angle topography in determining an object's internal structure and composition
A Standard patent application filed on 23 January 1998 credited to Komardin, Oleg V.
;
Lazarev, Pavel I
;
Lawrence, Albert F.
Details
Application number :
59291
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Inspection equipment using small-angle topography in determining an object's internal structure and composition
Inventor :
Komardin, Oleg V.
;
Lazarev, Pavel I
;
Lawrence, Albert F.