Semiconductor substrate having compound semiconductor layer, process for its production, and electronic device fabricated on semiconductor substrate
A Standard patent application filed on 16 March 1998 credited to Yonehara, Takao
;
Sato, Nobuhiko
Details
Application number :
58446
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
Semiconductor substrate having compound semiconductor layer, process for its production, and electronic device fabricated on semiconductor substrate