Acceleration sensor element and method of its manufacture
A Standard patent application filed on 22 October 1997 credited to Yoshida, Hitoshi
;
Tomonari, Shigeaki
;
Oka, Naomasa
;
Kasano, Fumihiro
;
Ishida, Takuro
;
Kamakura, Masanao
;
Nakamura, Takuro
Details
Application number :
47220
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Acceleration sensor element and method of its manufacture