Semiconductor substrate polishing pad dresser, method of manufacturing the same, and chemicomechanical polishing method using the same dresser
A Standard patent application filed on 14 October 1997 credited to Tamura, Motonori ; Kinoshita, Toshiya

Details

Application number :

44729  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Semiconductor substrate polishing pad dresser, method of manufacturing the same, and chemicomechanical polishing method using the same dresser  

Inventor :

Tamura, Motonori ; Kinoshita, Toshiya  

Agent name :

 

Address for service :

 

Filing date :

14 October 1997  

Associated companies :

 

Applicant name :

Nippon Steel Corporation  

Applicant address :

 

Old name :

 

Original Source :

Go