Details

Application number :
44552  
Application type :
Standard  
Application status :
CEASED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Alkysulfonyloximes for high-resolution I-line photoresists of high sensitivity  
Inventor :
Dietliker, Kurt ; De Leo, Christoph ; Yamato, Hitoshi ; Kunz, Martin  
Agent name :
Davies Collison Cave  
Address for service :
GPO Box 3876 SYDNEY NSW 2001  
Filing date :
22 August 1997  
Associated companies :
 
Applicant name :
Ciba Specialty Chemicals Holding Inc.  
Applicant address :
Klybeckstrasse 141 CH-4057 Basel Switzerland  
Old name :
 
Original Source :
Go  

Same Inventor