Chemical mechanical polishing composition and process
A Standard patent application filed on 21 July 1997 credited to Small, Robert J. ; Peterson, Mary Louise ; Maloney, David John ; McGhee, Laurence

Details

Application number :

36619  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Chemical mechanical polishing composition and process  

Inventor :

Small, Robert J. ; Peterson, Mary Louise ; Maloney, David John ; McGhee, Laurence  

Agent name :

 

Address for service :

 

Filing date :

21 July 1997  

Associated companies :

 

Applicant name :

EKC Technology, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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