Physical vapor deposition targets, conductive integrated circuit metal alloy interconnections, electroplating anodes, and metal alloys for use as a conductive interconnection in an integrated circuit
A Standard patent application filed on 14 November 2000 credited to Nagano, Shozo
;
Buehler, Jane
;
Li, Jianxing
;
Hargarter, Hinrich
Details
Application number :
16095
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Physical vapor deposition targets, conductive integrated circuit metal alloy interconnections, electroplating anodes, and metal alloys for use as a conductive interconnection in an integrated circuit