Fluoride additive containing chemical mechanical polishing slurry and method for use of same
A Standard patent application filed on 22 May 1997 credited to Streinz, Christopher C. ; Walters, Max H. ; Lucarelli, Michael A ; Mueller, Brian L

Details

Application number :

31385  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Fluoride additive containing chemical mechanical polishing slurry and method for use of same  

Inventor :

Streinz, Christopher C. ; Walters, Max H. ; Lucarelli, Michael A ; Mueller, Brian L  

Agent name :

 

Address for service :

 

Filing date :

22 May 1997  

Associated companies :

 

Applicant name :

Cabot Corporation  

Applicant address :

 

Old name :

 

Original Source :

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