Integrated device for capacitive measuring of nanometer distances
A Standard patent application filed on 30 April 1997 credited to Trontelj, Janez ; Kunc, Vinko

Details

Application number :

24201  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Integrated device for capacitive measuring of nanometer distances  

Inventor :

Trontelj, Janez ; Kunc, Vinko  

Agent name :

 

Address for service :

 

Filing date :

30 April 1997  

Associated companies :

 

Applicant name :

Austria Mikro Systeme Int. AG  

Applicant address :

Schloss Premstatten A-8141 Unterpremstatten Austria  

Old name :

 

Original Source :

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