Apparatus and method for improved deposition of conformal liner films and plugs in high aspect ratio contacts
A Standard patent application filed on 15 April 1997 credited to Weiss, Corey A. ; Bulson, Jeffrey M. ; Gittleman, Bruce

Details

Application number :

24004  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus and method for improved deposition of conformal liner films and plugs in high aspect ratio contacts  

Inventor :

Weiss, Corey A. ; Bulson, Jeffrey M. ; Gittleman, Bruce  

Agent name :

 

Address for service :

 

Filing date :

15 April 1997  

Associated companies :

 

Applicant name :

Sony Corporation  

Applicant address :

 

Old name :

 

Original Source :

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