Radial multiple chamber microelectronics processing apparatus and process of making and using the apparatus
A Standard patent application filed on 30 January 1997 credited to Leveen, Lindsay

Details

Application number :
22477  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Radial multiple chamber microelectronics processing apparatus and process of making and using the apparatus  
Inventor :
Leveen, Lindsay  
Agent name :
 
Address for service :
 
Filing date :
30 January 1997  
Associated companies :
 
Applicant name :
SLS Partners Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor