System and method for cooling workpieces processed by an ion implantation system
A Standard patent application filed on 14 February 1997 credited to Brailove, Adam A. ; Rose, Peter H. ; Purser, Kenneth H. ; Yang, Zhongmin ; Blake, Julian G.

Details

Application number :

20523  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

System and method for cooling workpieces processed by an ion implantation system  

Inventor :

Brailove, Adam A. ; Rose, Peter H. ; Purser, Kenneth H. ; Yang, Zhongmin ; Blake, Julian G.  

Agent name :

 

Address for service :

 

Filing date :

14 February 1997  

Associated companies :

 

Applicant name :

Eaton Corporation  

Applicant address :

 

Old name :

 

Original Source :

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