Chemical mechanical polishing compositions and systems
A Standard patent application filed on 30 October 2000 credited to Lindzy, Lisa M. ; Wang, Shumin

Details

Application number :

14571  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Chemical mechanical polishing compositions and systems  

Inventor :

Lindzy, Lisa M. ; Wang, Shumin  

Agent name :

 

Address for service :

 

Filing date :

30 October 2000  

Associated companies :

 

Applicant name :

Cabot Microelectronics Corporation  

Applicant address :

 

Old name :

 

Original Source :

Go