Plasma focus light source with improved pulse power system
A Standard patent application filed on 26 October 2000 credited to Partlo, William N ; Fomenkov, Igor V ; Birx, Daniel L ; Ness, Richard M. ; Oliver, I. Roger

Details

Application number :

14412  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Plasma focus light source with improved pulse power system  

Inventor :

Partlo, William N ; Fomenkov, Igor V ; Birx, Daniel L ; Ness, Richard M. ; Oliver, I. Roger  

Agent name :

 

Address for service :

 

Filing date :

26 October 2000  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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