Cerium oxide abrasive, semiconductor chip, semiconductor device, process for the production of them, and method for the polishing of substrates
A Standard patent application filed on 07 February 1997 credited to Matsuzawa, Jun ; Honma, Yoshio ; Tanno, Kiyohito ; Kurata, Yasushi

Details

Application number :

16705  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Cerium oxide abrasive, semiconductor chip, semiconductor device, process for the production of them, and method for the polishing of substrates  

Inventor :

Matsuzawa, Jun ; Honma, Yoshio ; Tanno, Kiyohito ; Kurata, Yasushi  

Agent name :

 

Address for service :

 

Filing date :

07 February 1997  

Associated companies :

 

Applicant name :

Hitachi Chemical Company, Ltd.  

Applicant address :

 

Old name :

 

Original Source :

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