Flat coil and lithographic method for producing microcomponents
A Standard patent application filed on 17 November 2000 credited to Schmitz, Felix ; Lacher, Manfred ; Nienhaus, Matthias

Details

Application number :

13949  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Flat coil and lithographic method for producing microcomponents  

Inventor :

Schmitz, Felix ; Lacher, Manfred ; Nienhaus, Matthias  

Agent name :

 

Address for service :

 

Filing date :

17 November 2000  

Associated companies :

 

Applicant name :

Institut Fur Mikrotechnik Mainz GmbH  

Applicant address :

 

Old name :

 

Original Source :

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