High speed diamond-based machining of silicon semiconductor die in wafer and packaged form for backside emission microscope detection
A Standard patent application filed on 14 November 1996 credited to Hurley, Daniel T.
Details
Application number :
77312
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
High speed diamond-based machining of silicon semiconductor die in wafer and packaged form for backside emission microscope detection