Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors
A Standard patent application filed on 30 September 1996 credited to Barnes, Michael S. ; Shufflebotham, Paul Kevin

Details

Application number :

73797  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors  

Inventor :

Barnes, Michael S. ; Shufflebotham, Paul Kevin  

Agent name :

 

Address for service :

 

Filing date :

30 September 1996  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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