Details
- Application number :
- 13018
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Illuminator, aligner, and method for fabricating device
- Inventor :
- Shiraishi, Naomasa
- Agent name :
-
- Address for service :
-
- Filing date :
- 08 November 2000
- Associated companies :
-
- Applicant name :
- Nikon Corporation
- Applicant address :
-
- Old name :
-
- Original Source :
- Go