Details

Application number :
13018  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Illuminator, aligner, and method for fabricating device  
Inventor :
Shiraishi, Naomasa  
Agent name :
 
Address for service :
 
Filing date :
08 November 2000  
Associated companies :
 
Applicant name :
Nikon Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor