Sputter target/backing plate assembly and method of making same
A Standard patent application filed on 05 August 1996 credited to Gilman, Paul S. ; Annavarapu, Suresh ; Hunt, Thomas J

Details

Application number :

68427  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Sputter target/backing plate assembly and method of making same  

Inventor :

Gilman, Paul S. ; Annavarapu, Suresh ; Hunt, Thomas J  

Agent name :

 

Address for service :

 

Filing date :

05 August 1996  

Associated companies :

 

Applicant name :

Materials Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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