Lens scatterometer system
A Standard patent application filed on 31 July 1996 credited to McNeil, John R. ; Wilson, Scott R. ; Naqvi, S. Sohail H.

Details

Application number :

66848  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Lens scatterometer system  

Inventor :

McNeil, John R. ; Wilson, Scott R. ; Naqvi, S. Sohail H.  

Agent name :

 

Address for service :

 

Filing date :

31 July 1996  

Associated companies :

 

Applicant name :

McNeil, John R.  

Applicant address :

 

Old name :

 

Original Source :

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