Details
- Application number :
- 12071
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Planar magnetron sputtering apparatus
- Inventor :
- Wescott, M. Elizabeth
;
Kastanis, William P.
- Agent name :
-
- Address for service :
-
- Filing date :
- 16 October 2000
- Associated companies :
-
- Applicant name :
- Cierra Photonics, Inc.
- Applicant address :
-
- Old name :
-
- Original Source :
- Go