A scalable helicon wave plasma processing device with a non-cylindrical source chamber
A Standard patent application filed on 28 June 1996 credited to Benjamin, Neil ; Jewett, Russell ; Mangano, Stefano

Details

Application number :

64054  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

A scalable helicon wave plasma processing device with a non-cylindrical source chamber  

Inventor :

Benjamin, Neil ; Jewett, Russell ; Mangano, Stefano  

Agent name :

 

Address for service :

 

Filing date :

28 June 1996  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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