Method and apparatus for etching and deposition using micro-plasmas
A Standard patent application filed on 11 October 2000 credited to Wilson, Chester G. ; Gianchandani, Yogesh B.

Details

Application number :

11960  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for etching and deposition using micro-plasmas  

Inventor :

Wilson, Chester G. ; Gianchandani, Yogesh B.  

Agent name :

 

Address for service :

 

Filing date :

11 October 2000  

Associated companies :

 

Applicant name :

Wisconsin Alumni Research Foundation  

Applicant address :

 

Old name :

 

Original Source :

Go