Method for characterizing defects on semiconductor wafers
A Standard patent application filed on 28 June 1996 credited to Lee, Ken K ; Worster, Bruce W.

Details

Application number :

63413  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for characterizing defects on semiconductor wafers  

Inventor :

Lee, Ken K ; Worster, Bruce W.  

Agent name :

 

Address for service :

 

Filing date :

28 June 1996  

Associated companies :

 

Applicant name :

Ultrapointe Corporation  

Applicant address :

 

Old name :

 

Original Source :

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