A silicon mesa structure integrated in a glass-on-silicon waveguide, and a method of manufacturing it
A Standard patent application filed on 03 November 2000 credited to Mattsson, Kent Erik
Details
Application number :
11317
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
A silicon mesa structure integrated in a glass-on-silicon waveguide, and a method of manufacturing it