Electrode clamping assembly and method for assembly and use thereof

Application number :: 57532
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Electrode clamping assembly and method for assembly and use thereof
Inventor :: Lenz, Eric H. ; Frazier, Robert A. ; Miller, Ivo A. ; Calvisi, Michael L.
Agent name :
Address for service :
Filing date :: 17 May 1996
Associated companies :
Applicant name :: Lam Research Corporation
Applicant address :
Old name :
Original Source :: Go

Electrode clamping assembly and method for assembly and use thereof A Standard patent application filed on 17 May 1996 credited to Lenz, Eric H. ; Frazier, Robert A. ; Miller, Ivo A. ; Calvisi, Michael L.